Structural properties of fluorinated amorphous carbon films

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Structural properties of fluorinated amorphous carbon films

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Title: Structural properties of fluorinated amorphous carbon films
Author: West, M.; Startham, M.; Gangopadhyay, S.; Temkin, H.; Bouldin, K.; Harris, H.; Wang, X.
Abstract: Fluorinated amorphous carbon films have been deposited in a plasma-enhanced chemical vapor deposition system, and the optical properties examined by Fourier transform infrared and ultraviolet-visible absorption spectroscopy. The infrared absorption spectra in the region from 1000 to 1800 cm21 were resolved into ten peaks, which were assigned to various carbon–fluorine and carbon–carbon vibration modes. A relationship between the optical band gap and the aromatic carbon (sp2) concentration is demonstrated.
URI: http://hdl.handle.net/2346/2097
Date: 2001-01-01

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