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Title:
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Structural properties of fluorinated amorphous carbon films |
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Author:
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West, M.; Startham, M.; Gangopadhyay, S.; Temkin, H.; Bouldin, K.; Harris, H.; Wang, X.
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Abstract:
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Fluorinated amorphous carbon films have been deposited in a plasma-enhanced chemical vapor
deposition system, and the optical properties examined by Fourier transform infrared and
ultraviolet-visible absorption spectroscopy. The infrared absorption spectra in the region from 1000
to 1800 cm21 were resolved into ten peaks, which were assigned to various carbon–fluorine and
carbon–carbon vibration modes. A relationship between the optical band gap and the aromatic
carbon (sp2) concentration is demonstrated. |
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URI:
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http://hdl.handle.net/2346/2097
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Date:
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2001-01-01 |