A generic real-time process control system

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A generic real-time process control system

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dc.creator Arrant, Edwin Keith
dc.date.available 2011-02-19T00:00:04Z en_US
dc.date.issued 1989-12 en_US
dc.identifier.uri http://hdl.handle.net/2346/20903 en_US
dc.description.abstract A major problem facing manufacturers is the design and implementation of flexible automation systems. This problem is complicated by the many differing requirements for automated systems. Every facility has its own specific requirements; therefore, a generic factory control system design could provide the flexibility and adaptability to solve a wide variety of automation needs. Since factory automation systems are implemented from the bottom up, it is necessary to ensure that the initial automated subsystems are going to be compatible with future system enhancements. This thesis describes the various levels of factory automation and establishes a functional specification for each subsystem in the automated facility. These specifications provide the general information required to define the design objectives for the facility subsystems. The first step toward obtaining a solution to the automation problem is to develop a generic software control system for process equipment. A first-generation control system has been developed and applied to a four-module HF vapor etcher system, used in the processing of semiconductor wafers. en_US
dc.language.iso en_US en_US
dc.publisher Texas Tech University en_US
dc.subject Process control en_US
dc.subject Automation en_US
dc.subject Automatic control en_US
dc.title A generic real-time process control system en_US
dc.type Electronic Thesis en_US
thesis.degree.department Electrical and Computer Engineering
dc.degree.department Electrical and Computer Engineering en_US
dc.degree.discipline Electrical and Computer Engineering en_US
dc.degree.grantor Texas Tech University en_US
dc.degree.level Masters en_US
dc.degree.name M.S.E.E. en_US
dc.rights.availability unrestricted en_US

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