Materials for advanced microlithography: polymers for 157 nm lithography and acid diffusion measurements

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Title: Materials for advanced microlithography: polymers for 157 nm lithography and acid diffusion measurements
Author: Tran, Hoang Vi
Abstract: Not available
URI: http : / /hdl .handle .net /2152 /1001
Date: 2008-08-28

Citation

Materials for advanced microlithography: polymers for 157 nm lithography and acid diffusion measurements. Doctoral dissertation, The University of Texas at Austin. Available electronically from http : / /hdl .handle .net /2152 /1001 .

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