The product mix problem for manufacturing of silicon wafers by diffusion process

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Title: The product mix problem for manufacturing of silicon wafers by diffusion process
Author: Qasim, Ali Mohammed
Abstract: In silicon wafer manufacturing there are several types of processes conducted in diffusion furnaces with different processing times . Each of these furnaces is dedicated for one type of process . The same type of process can be performed on any of the available furnaces dedicated for that particular process . These furnaces can be grouped in a single aisle or several aisles . The silicon wafers go through a series of controlled environment diffusion furnaces . These furnaces are rarely used to their capacity . A typical efficiency of these furnace tubes is somewhere between 28 to 35 % [9] . This efficiency can be increased by assigning the proper number of wafers to these furnace tubes . The problem of finding the number of tubes required for each process to maximize the production is dealt with in this study .
URI: http : / /hdl .handle .net /2346 /14231
Date: 1988-08

Citation

The product mix problem for manufacturing of silicon wafers by diffusion process. Master's thesis, Texas Tech University. Available electronically from http : / /hdl .handle .net /2346 /14231 .

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