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Title:
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The product mix problem for manufacturing of silicon wafers by diffusion process |
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Author:
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Qasim, Ali Mohammed |
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Description:
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In silicon wafer manufacturing there are several types of processes conducted in diffusion furnaces with different processing times . Each of these furnaces is dedicated for one type of process . The same type of process can be performed on any of the available furnaces dedicated for that particular process . These furnaces can be grouped in a single aisle or several aisles . The silicon wafers go through a series of controlled environment diffusion furnaces . These furnaces are rarely used to their capacity . A typical efficiency of these furnace tubes is somewhere between 28 to 35 % [9] . This efficiency can be increased by assigning the proper number of wafers to these furnace tubes . The problem of finding the number of tubes required for each process to maximize the production is dealt with in this study . |
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URI:
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http : / /hdl .handle .net /2346 /14231
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Date:
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2012-11-29 |
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