Light driven microactuators : design, fabrication, and mathematical modeling

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Title: Light driven microactuators : design, fabrication, and mathematical modeling
Author: Han, Li-Hsin
Abstract: This dissertation is concerned with design , fabrication , and mathematical modeling of three different microactuators driven by light . Compared to electricity , electromagnetic wave is a wireless source of power . A distant light source can be delivered , absorbed , and converted to generate a driving force for a microactuator . The study of light -driven microsystems , still at its early stage , is already expanding the horizon for the research of microsystems . The microactuators of this dissertation include micro -cantilevers driven by pulsed laser , photo -deformable microshells coated with gold nanospheres , and a nano -particles coated micro -turbine driven by visible light . Experimental investigation and theoretical analysis of these microactuators showed interesting results . These microactuators were functioned based on cross -linked , multiple physics phenomenon , such as photo -heating , thermal expansion , photo -chemistry effect , plasomonics enhancement , and thermal convection in rarefied gas . These multiple physics effects dominate the function of a mechanical system , when the system size becomes small . The modeling results of the microactuators suggest that , to simulate a microscale mechanical system accurately , one has to take account the minimum dimension of the system and to consider the validity of a theoretical model . Examples of the building of different microstructures were shown to demonstrate the capacity of a digital -micromirror -device (DMD ) based apparatus for three -dimensional , heterogeneous fabrication of polymeric microstructures .
URI: http : / /hdl .handle .net /2152 /9697
Date: 2011-01-24


Light driven microactuators : design, fabrication, and mathematical modeling. Doctoral dissertation, The University of Texas at Austin. Available electronically from http : / /hdl .handle .net /2152 /9697 .

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