Nanoindentation study of buckling and friction of silicon nanolines

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dc.contributor.advisor Ho , P . S .
dc.creator Luo , Zhiquan 2009 -10 -20T17 :40 :33Z 2014 -02 -19T22 :36 :32Z 2009 -10 -20T17 :40 :33Z 2014 -02 -19T22 :36 :32Z 2009 -05 2009 -10 -20T17 :40 :33Z
dc.identifier.uri http : / /hdl .handle .net /2152 /6576
dc.description.abstract Silicon -based nanostructures are essential building blocks for nanoelectronic devices and nano -electromechanical systems (NEMS ) . As the silicon device size continues to scale down , the surface to volume ratio becomes larger , rendering the properties of surfaces and interfaces more important for improving the properties of the nano -devices and systems . One of those properties is the friction , which is important in controlling the functionality and reliability of the nano -device and systems . The goal of this dissertation is to investigate the deformation and friction behaviors of single crystalline silicon nanolines (SiNLs ) using nanoindentation techniques . Following an introduction and a summary of the theoretical background of contact friction in Chapters 1 and 2 , the results of this thesis are presented in three chapters . In Chapter 3 , the fabrication of the silicon nanolines is described . The fabrication method yielded high -quality single -crystals with line width ranging from 30nm to 90nm and height to width aspect ratio ranging from 10 to 25 . These SiNL structures have properties and dimensions well suited for the study of the mechanical and friction behaviors at the nanoscale . In Chapter 4 , we describe the study of the mechanical properties of SiNLs using the nanoindentation method . The loading -displacement curves show that the critical load to induce the buckling of the SiNLs can be correlated to the contact friction and geometry of SiNLs . A map was built as a guideline to describe the selection of buckling modes . The map was divided into three regions where different regions correlate to different buckling modes including Mode I , Mode II and slidingbending of SiNLs . In Chapter 5 , we describe the study of the contact friction of the SiNL structures . The friction coefficient at the contact was extracted from the loaddisplacement curves . Subsequently , the frictional shear stress was evaluated . In addition , the effect of the interface between the indenter and SiNLs was investigated using SiNLs with surfaces coated by a thin silicon dioxide or chromium film . The material of the interface was found to influence significantly the contact friction and its behavior . Cyclic loading -unloading experiments showed the friction coefficient dramatically changed after only a few loading cycles , indicating the contact history is important in controlling the friction behaviors of SiNLs at nanoscales . This thesis is concluded with a summary of the results and proposed future studies . en_US
dc.format.medium electronic
dc.language.iso eng en_US
dc.rights Copyright © is held by the author . Presentation of this material on the Libraries' web site by University Libraries , The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works .
dc.subject Nano -device en_US
dc.subject Nano -systems en_US
dc.subject Deformation en_US
dc.subject Friction en_US
dc.subject Single crystalline silicon nanolines en_US
dc.title Nanoindentation study of buckling and friction of silicon nanolines en_US
dc.description.department Physics en_US
dc.type.genre Thesis
dc.type.material text Doctor of Philosophy en_US Doctoral en_US Physics en_US The University of Texas at Austin Physics en_US


Nanoindentation study of buckling and friction of silicon nanolines. Doctoral dissertation, The University of Texas at Austin. Available electronically from http : / /hdl .handle .net /2152 /6576 .

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