Fabrication and characterization of a double torsional mechanical oscillator and its applications in gold micromass measurements

Show simple item record


dc.contributor.advisor Markert , John T .
dc.creator Lu , Wei , 1975 -
dc.date.accessioned 2012 -10 -05T14 :16 :12Z
dc.date.accessioned 2012 -11 -29T20 :54 :31Z
dc.date.available 2012 -10 -05T14 :16 :12Z
dc.date.available 2012 -11 -29T20 :54 :31Z
dc.date.created 2008
dc.date.issued 2012 -10 -05
dc.identifier.uri http : / /hdl .handle .net /2152 /18178
dc.description.abstract We report the design and fabrication of a micro -mechanical oscillator for use in extremely small force detection experiments such as transverse force measurements of a moving vortex and Nuclear Magnetic Resonance Force Microscopy (NMRFM ) . We study the basic physics of the double torsional mechanical oscillator , and pursue double torsional oscillators with small spring constants , high resonance frequencies , and high quality factors . Using a series of semiconductor manufacturing techniques , especially using the electron -beam lithography technique , we successfully micro -fabricate double torsional mechanical oscillators from silicon -on -insulator wafers . We conduct characterization experiments to extract important parameters of a mechanical oscillator , including the resonance frequencies , spring constants , and quality factors . We focus on the four typical resonance modes of these oscillators , and then compare the force detection sensitivity of each mode . Eventually we apply these force sensitive oscillators to gold micro -mass measurements , and achieve very small mass detection . In the future we are going to continue to micro -fabricate thinner oscillators to reduce the spring constants , and improve the quality factors by designing more suitable geometric shapes and by pursuing annealing studies . Thus , we might be able to achieve single nuclear spin measurements using NMRFM . en_US
dc.format.medium electronic
dc.language.iso eng en_US
dc.rights Copyright © is held by the author . Presentation of this material on the Libraries' web site by University Libraries , The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works .
dc.subject.lcsh Harmonic oscillators - -Design and construction
dc.subject.lcsh Physical measurements
dc.subject.lcsh Nanostructured materials
dc.subject.lcsh Lithography , Electron beam
dc.title Fabrication and characterization of a double torsional mechanical oscillator and its applications in gold micromass measurements en_US
dc.description.department Physics en_US
dc.type.genre Thesis
dc.type.material text
thesis.degree.name Doctor of Philosophy en_US
thesis.degree.level Doctoral en_US
thesis.degree.discipline Physics en_US
thesis.degree.grantor The University of Texas at Austin
thesis.degree.department Physics en_US

Citation

Fabrication and characterization of a double torsional mechanical oscillator and its applications in gold micromass measurements. Doctoral dissertation, The University of Texas at Austin. Available electronically from http : / /hdl .handle .net /2152 /18178 .

Files in this item

Files Size Format View

There are no files associated with this item.

This item appears in the following Collection(s)

Show simple item record

Search DSpace

Advanced Search

Browse