Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials

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dc.contributor.advisor Willson , C . G . (C . Grant ) , 1939 - en_US
dc.identifier.oclc 58389475 en_US
dc.creator Osborn , Brian Philip en_US
dc.date.accessioned 2008 -08 -28T21 :58 :17Z
dc.date.accessioned 2014 -02 -19T22 :26 :43Z
dc.date.available 2008 -08 -28T21 :58 :17Z
dc.date.available 2014 -02 -19T22 :26 :43Z
dc.date.created 2004 en_US
dc.date.issued 2008 -08 -28T21 :58 :17Z
dc.identifier.uri http : / /hdl .handle .net /2152 /1381
dc.description.abstract Not available en_US
dc.format.medium electronic en_US
dc.language.iso eng en_US
dc.rights Copyright © is held by the author . Presentation of this material on the Libraries' web site by University Libraries , The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works . en_US
dc.subject.lcsh Photolithography en_US
dc.subject.lcsh Vacuum ultraviolet spectroscopy en_US
dc.subject.lcsh Photoresists en_US
dc.title Vacuum ultraviolet directed design , synthesis and development of 157nm photoresist materials en_US
dc.description.department Chemistry en_US
dc.description.department Chemistry and Biochemistry
dc.identifier.recnum b59340447 en_US
dc.type.genre Thesis en_US
dc.type.material text en_US
dc.identifier.proqst 3150706 en_US
thesis.degree.name Doctor of Philosophy en_US
thesis.degree.level Doctoral en_US
thesis.degree.discipline Chemistry en_US
thesis.degree.grantor The University of Texas at Austin en_US
thesis.degree.department Chemistry en_US

Citation

Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials. Doctoral dissertation, The University of Texas at Austin. Available electronically from http : / /hdl .handle .net /2152 /1381 .

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