| dc.contributor.advisor |
Willson , C . G . (C . Grant ) , 1939 - |
en_US |
| dc.identifier.oclc |
58389475 |
en_US |
| dc.creator |
Osborn , Brian Philip |
en_US |
| dc.date.accessioned |
2008 -08 -28T21 :58 :17Z |
|
| dc.date.accessioned |
2011 -08 -15T21 :55 :19Z |
|
| dc.date.available |
2008 -08 -28T21 :58 :17Z |
|
| dc.date.available |
2011 -08 -15T21 :55 :19Z |
|
| dc.date.created |
2004 |
en_US |
| dc.date.issued |
2008 -08 -28T21 :58 :17Z |
|
| dc.identifier.uri |
http : / /hdl .handle .net /2152 /1381 |
|
| dc.description.abstract |
Not available |
en_US |
| dc.format.medium |
electronic |
en_US |
| dc.language.iso |
eng |
en_US |
| dc.rights |
Copyright © is held by the author . Presentation of this material on
the Libraries' web site by University Libraries , The University of Texas at Austin was made
possible under a limited license grant from the author who has retained all copyrights in
the works . |
en_US |
| dc.subject.lcsh |
Photolithography |
en_US |
| dc.subject.lcsh |
Vacuum ultraviolet spectroscopy |
en_US |
| dc.subject.lcsh |
Photoresists |
en_US |
| dc.title |
Vacuum ultraviolet directed design , synthesis and development of 157nm photoresist materials |
en_US |
| dc.description.department |
Chemistry |
en_US |
| dc.description.department |
Chemistry and Biochemistry |
|
| dc.identifier.recnum |
b59340447 |
en_US |
| dc.type.genre |
Thesis |
en_US |
| dc.type.material |
text |
en_US |
| dc.identifier.proqst |
3150706 |
en_US |
| thesis.degree.name |
Doctor of Philosophy |
en_US |
| thesis.degree.level |
Doctoral |
en_US |
| thesis.degree.discipline |
Chemistry |
en_US |
| thesis.degree.grantor |
The University of Texas at Austin |
en_US |
| thesis.degree.department |
Chemistry |
en_US |