Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials

Show full item record

Title: Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials
Author: Osborn, Brian Philip
Abstract: Not available
URI: http : / /hdl .handle .net /2152 /1381
Date: 2008-08-28

Citation

Vacuum ultraviolet directed design, synthesis and development of 157nm photoresist materials. Doctoral dissertation, The University of Texas at Austin. Available electronically from http : / /hdl .handle .net /2152 /1381 .

Files in this item

Files Size Format View

There are no files associated with this item.

This item appears in the following Collection(s)

Show full item record

Search DSpace

Advanced Search

Browse