Hafnium dioxide gate dielectrics, metal gate electrodes, and phenomena occurring at their interfaces

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dc.contributor.advisor Ekerdt , John G . en_US
dc.identifier.oclc 57663399 en_US
dc.creator Schaeffer , James Kenyon en_US
dc.date.accessioned 2008 -08 -28T21 :53 :13Z
dc.date.accessioned 2014 -02 -19T22 :26 :22Z
dc.date.available 2008 -08 -28T21 :53 :13Z
dc.date.available 2014 -02 -19T22 :26 :22Z
dc.date.created 2004 en_US
dc.date.issued 2008 -08 -28T21 :53 :13Z
dc.identifier.uri http : / /hdl .handle .net /2152 /1258
dc.description.abstract Not available en_US
dc.format.medium electronic en_US
dc.language.iso eng en_US
dc.rights Copyright © is held by the author . Presentation of this material on the Libraries' web site by University Libraries , The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works . en_US
dc.subject.lcsh Hafnium oxide en_US
dc.subject.lcsh Dielectrics en_US
dc.subject.lcsh Electrodes en_US
dc.subject.lcsh Metal oxide semiconductor field -effect transistors en_US
dc.title Hafnium dioxide gate dielectrics , metal gate electrodes , and phenomena occurring at their interfaces en_US
dc.description.department Materials Science and Engineering en_US
dc.identifier.recnum b59058602 en_US
dc.type.genre Thesis en_US
dc.type.material text en_US
dc.identifier.proqst 3143465 en_US
thesis.degree.name Doctor of Philosophy en_US
thesis.degree.level Doctoral en_US
thesis.degree.discipline Materials Science and Engineering en_US
thesis.degree.grantor The University of Texas at Austin en_US
thesis.degree.department Materials Science and Engineering en_US

Citation

Hafnium dioxide gate dielectrics, metal gate electrodes, and phenomena occurring at their interfaces. Doctoral dissertation, The University of Texas at Austin. Available electronically from http : / /hdl .handle .net /2152 /1258 .

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