| dc.contributor.advisor |
Banerjee , Sanjay |
|
| dc.creator |
Li , Hong -jyh |
|
| dc.date.accessioned |
2011 -05 -16T21 :14 :18Z |
|
| dc.date.accessioned |
2011 -08 -16T15 :56 :31Z |
|
| dc.date.available |
2011 -05 -16T21 :14 :18Z |
|
| dc.date.available |
2011 -08 -16T15 :56 :31Z |
|
| dc.date.created |
2002 -08 |
|
| dc.date.issued |
2011 -05 -16 |
|
| dc.identifier.uri |
http : / /hdl .handle .net /2152 /11248 |
|
| dc.description.abstract |
Not available |
en_US |
| dc.format.medium |
electronic |
|
| dc.language.iso |
eng |
en_US |
| dc.rights |
Copyright © is held by the author . Presentation of this material on the Libraries' web site by University Libraries , The University of Texas at Austin was made possible under a limited license grant from the author who has retained all copyrights in the works . |
|
| dc.subject |
Boron compounds |
en_US |
| dc.subject |
Ion implantation |
en_US |
| dc.subject |
Diffusion - -Computer simulation |
en_US |
| dc.title |
Ultra -shallow junction formation : co -implantation and rapid thermal annealing |
en_US |
| dc.description.department |
Electrical and Computer Engineering |
en_US |
| dc.type.genre |
Thesis |
|
| dc.type.material |
text |
|
| thesis.degree.name |
Doctor of Philosophy |
en_US |
| thesis.degree.level |
Doctoral |
en_US |
| thesis.degree.discipline |
Electrical and Computer Engineering |
en_US |
| thesis.degree.grantor |
The University of Texas at Austin |
|
| thesis.degree.department |
Electrical and Computer Engineering |
en_US |
| dc.rights.restriction |
Restricted |
|