Laser-assisted scanning probe alloying nanolithography (LASPAN) and its application in gold-silicon system

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Title: Laser-assisted scanning probe alloying nanolithography (LASPAN) and its application in gold-silicon system
Author: Peng, Luohan
Abstract: Nanoscale science and technology demand novel approaches and new knowledge to further advance . Nanoscale fabrication has been widely employed in both modern science and engineering . Micro /nano lithography is the most common technique to deposit nanostructures . Fundamental research is also being conducted to investigate structural , physical and chemical properties of the nanostructures . This research contributes fundamental understanding in surface science through development of a new methodology . Doing so , experimental approaches combined with energy analysis were carried out . A delicate hardware system was designed and constructed to realize the nanometer scale lithography . We developed a complete process , namely laser -assisted scanning probe alloying nanolithography (LASPAN ) , to fabricate well -defined nanostructures in gold -silicon (Au -Si ) system . As a result , four aspects of nanostructures were made through different experimental trials . A non -equilibrium phase (AuSi3 ) was discovered , along with a non -equilibrium phase diagram . Energy dissipation and mechanism of nanocrystalization in the process have been extensively discussed . The mechanical energy input and laser radiation induced thermal energy input were estimated . An energy model was derived to represent the whole process of LASPAN .
URI: http : / /hdl .handle .net /1969 .1 /ETD -TAMU -3021
Date: 2009-05-15

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Laser-assisted scanning probe alloying nanolithography (LASPAN) and its application in gold-silicon system. Available electronically from http : / /hdl .handle .net /1969 .1 /ETD -TAMU -3021 .

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