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Description:
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The most commonly known macro scale probing devices are simply comprised
of metallic leads used for measuring electrical signals . On the other hand ,
micromachined probing devices are realized using microfabrication techniques and are
capable of providing very fine , micro /nano scale interaction with matter ; along with a
broad range of applications made possible by incorporating MEMS sensing and
actuation techniques . Micromachined probes consist of a well -defined tip structure that
determines the interaction space , and a transduction mechanism that could be used for
sensing a change , imparting external stimuli or manipulating matter .
Several micromachined probes intended for biological and nanotechnology
applications were fabricated , characterized and tested . Probes were developed under two
major categories . The first category consists of Micro Electromagnetic Probes for
biological applications such as single cell , particle , droplet manipulation and neuron
stimulation applications ; whereas the second category targets novel Scanning Probe
topologies suitable for direct nanopatterning , variable resolution scanning probe /dip -pen
nanolithography , and biomechanics applications .
The functionality and versatility of micromachined probes for a broad range of
micro and nanotechnology applications is successfully demonstrated throughout the five
different probes /applications that were studied . It is believed that , the unique advantages
of precise positioning capability , confinement of interaction as determined by the probe
tip geometry , and special sensor /actuator mechanisms incorporated through MEMS
technologies will render micromachined probes as indispensable tools for microsystems
and nanotechnology studies . |