Development of Micromachined Probes for Bio-Nano Applications

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Title: Development of Micromachined Probes for Bio-Nano Applications
Author: Yapici, Murat K.
Abstract: The most commonly known macro scale probing devices are simply comprised of metallic leads used for measuring electrical signals . On the other hand , micromachined probing devices are realized using microfabrication techniques and are capable of providing very fine , micro /nano scale interaction with matter ; along with a broad range of applications made possible by incorporating MEMS sensing and actuation techniques . Micromachined probes consist of a well -defined tip structure that determines the interaction space , and a transduction mechanism that could be used for sensing a change , imparting external stimuli or manipulating matter . Several micromachined probes intended for biological and nanotechnology applications were fabricated , characterized and tested . Probes were developed under two major categories . The first category consists of Micro Electromagnetic Probes for biological applications such as single cell , particle , droplet manipulation and neuron stimulation applications ; whereas the second category targets novel Scanning Probe topologies suitable for direct nanopatterning , variable resolution scanning probe /dip -pen nanolithography , and biomechanics applications . The functionality and versatility of micromachined probes for a broad range of micro and nanotechnology applications is successfully demonstrated throughout the five different probes /applications that were studied . It is believed that , the unique advantages of precise positioning capability , confinement of interaction as determined by the probe tip geometry , and special sensor /actuator mechanisms incorporated through MEMS technologies will render micromachined probes as indispensable tools for microsystems and nanotechnology studies .
URI: http : / /hdl .handle .net /1969 .1 /ETD -TAMU -2009 -08 -6966
Date: 2010-01-14


Development of Micromachined Probes for Bio-Nano Applications. Available electronically from http : / /hdl .handle .net /1969 .1 /ETD -TAMU -2009 -08 -6966 .

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