Design for manufacturing (DFM) in submicron VLSI design

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Title: Design for manufacturing (DFM) in submicron VLSI design
Author: Cao, Ke
Abstract: As VLSI technology scales to 65nm and below , traditional communication between design and manufacturing becomes more and more inadequate . Gone are the days when designers simply pass the design GDSII ?le to the foundry and expect very good man ?ufacturing and parametric yield . This is largely due to the enormous challenges in the manufacturing stage as the feature size continues to shrink . Thus , the idea of DFM (Design for Manufacturing ) is getting very popular . Even though there is no universally accepted de ?nition of DFM , in my opinion , one of the major parts of DFM is to bring manufacturing information into the design stage in a way that is understood by designers . Consequently , designers can act on the information to improve both manufacturing and parametric yield . In this dissertation , I will present several attempts to reduce the gap between design and manufacturing communities : Alt -PSM aware standard cell designs , printability improve ?ment for detailed routing and the ASIC design ?ow with litho aware static timing analysis . Experiment results show that we can greatly improve the manufacturability of the designs and we can reduce design pessimism signi ?cantly for easier design closure .
URI: http : / /hdl .handle .net /1969 .1 /ETD -TAMU -1430
Date: 2009-05-15


Design for manufacturing (DFM) in submicron VLSI design. Available electronically from http : / /hdl .handle .net /1969 .1 /ETD -TAMU -1430 .

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