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Description:
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As VLSI technology scales to 65nm and below , traditional communication between design and manufacturing becomes more and more inadequate . Gone are the days when designers simply pass the design GDSII file to the foundry and expect very good man¬ufacturing and parametric yield . This is largely due to the enormous challenges in the manufacturing stage as the feature size continues to shrink . Thus , the idea of DFM (Design for Manufacturing ) is getting very popular . Even though there is no universally accepted definition of DFM , in my opinion , one of the major parts of DFM is to bring manufacturing information into the design stage in a way that is understood by designers . Consequently , designers can act on the information to improve both manufacturing and parametric yield . In this dissertation , I will present several attempts to reduce the gap between design and manufacturing communities : Alt -PSM aware standard cell designs , printability improve¬ment for detailed routing and the ASIC design flow with litho aware static timing analysis . Experiment results show that we can greatly improve the manufacturability of the designs and we can reduce design pessimism significantly for easier design closure . |