Design for manufacturing (DFM) in submicron VLSI design

Show full item record

Title: Design for manufacturing (DFM) in submicron VLSI design
Author: Cao, Ke
Abstract: As VLSI technology scales to 65nm and below , traditional communication between design and manufacturing becomes more and more inadequate . Gone are the days when designers simply pass the design GDSII ?le to the foundry and expect very good man ?ufacturing and parametric yield . This is largely due to the enormous challenges in the manufacturing stage as the feature size continues to shrink . Thus , the idea of DFM (Design for Manufacturing ) is getting very popular . Even though there is no universally accepted de ?nition of DFM , in my opinion , one of the major parts of DFM is to bring manufacturing information into the design stage in a way that is understood by designers . Consequently , designers can act on the information to improve both manufacturing and parametric yield . In this dissertation , I will present several attempts to reduce the gap between design and manufacturing communities : Alt -PSM aware standard cell designs , printability improve ?ment for detailed routing and the ASIC design ?ow with litho aware static timing analysis . Experiment results show that we can greatly improve the manufacturability of the designs and we can reduce design pessimism signi ?cantly for easier design closure .
URI: http : / /hdl .handle .net /1969 .1 /ETD -TAMU -1430
Date: 2009-05-15

Citation

Design for manufacturing (DFM) in submicron VLSI design. Available electronically from http : / /hdl .handle .net /1969 .1 /ETD -TAMU -1430 .

Files in this item

Files Size Format View

There are no files associated with this item.

This item appears in the following Collection(s)

Show full item record

Search DSpace

Advanced Search

Browse