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Integrated sensors fabricated on flexible substrates show lots of promise due to their ability to conform on non -planar surfaces . Potential applications could be smart -skin and wearable electronics which can be used on prosthetic devices or in harsh environments to provide with the sense of feel of the ambient . Design , fabrication and characterization of MEMS piezoresistive pressure sensors and capacitive accelerometers were done on Si and flexible polymer substrates using surface micromachining to be used on aerospace applications . Devices were successfully tested on planar surfaces .For the pressure sensor fabrication , Si3N4 was used as a membrane material due to its linearity and high elasticity while polysilicon was used as a piezoresistive material because of its high gauge factor as well as linear response . Response measurements of fabricated devices resulted in slightly lower values compared to the ones obtained from simulations .Accelerometer fabrication was done with UV -LIGA (Ultra -violet Lithographie , Galvanoformung , Abformung ) . Ni was used as a proof mass because of its relatively high density and corrosion resistance . Response measurements of fabricated accelerometers resulted in higher values compared to simulated ones . Although there was difference between simulated and fabricated responses , device measurements on Si and flexible substrates showed comparable values . |
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