Failure Assessment In Aerospace Systems Via Integrated Multi-functional Sensors

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dc.contributor Gonenli , Ismail Erkin en_US 2010 -07 -19T19 :55 :00Z 2011 -08 -24T21 :43 :46Z 2010 -07 -19T19 :55 :00Z 2011 -08 -24T21 :43 :46Z 2010 -07 -19 January 2010 en_US
dc.identifier.uri http : / /hdl .handle .net /10106 /4940
dc.description.abstract Integrated sensors fabricated on flexible substrates show lots of promise due to their ability to conform on non -planar surfaces . Potential applications could be smart -skin and wearable electronics which can be used on prosthetic devices or in harsh environments to provide with the sense of feel of the ambient . Design , fabrication and characterization of MEMS piezoresistive pressure sensors and capacitive accelerometers were done on Si and flexible polymer substrates using surface micromachining to be used on aerospace applications . Devices were successfully tested on planar surfaces .For the pressure sensor fabrication , Si3N4 was used as a membrane material due to its linearity and high elasticity while polysilicon was used as a piezoresistive material because of its high gauge factor as well as linear response . Response measurements of fabricated devices resulted in slightly lower values compared to the ones obtained from simulations .Accelerometer fabrication was done with UV -LIGA (Ultra -violet Lithographie , Galvanoformung , Abformung ) . Ni was used as a proof mass because of its relatively high density and corrosion resistance . Response measurements of fabricated accelerometers resulted in higher values compared to simulated ones . Although there was difference between simulated and fabricated responses , device measurements on Si and flexible substrates showed comparable values . en_US
dc.language.iso EN en_US
dc.publisher Electrical Engineering en_US
dc.title Failure Assessment In Aerospace Systems Via Integrated Multi -functional Sensors en_US
dc.type Ph .D . en_US


Failure Assessment In Aerospace Systems Via Integrated Multi-functional Sensors. Available electronically from http : / /hdl .handle .net /10106 /4940 .

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