3D Interconnects For Die And Wafer Stacks

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dc.contributor Dewan , Rachita en_US
dc.date.accessioned 2007 -08 -23T01 :56 :20Z
dc.date.accessioned 2011 -08 -24T21 :40 :03Z
dc.date.available 2007 -08 -23T01 :56 :20Z
dc.date.available 2011 -08 -24T21 :40 :03Z
dc.date.issued 2007 -08 -23T01 :56 :20Z
dc.date.submitted August 2006 en_US
dc.identifier.uri http : / /hdl .handle .net /10106 /241
dc.description.abstract 3D integration results from the ever demanding trend towards smaller and lower -profile , lighter and lower cost packaged devices requires further package miniaturization . With the present System -on -chip (SOC ) technology reaching its limitation in terms of functionality and cost , effort are being concentrated on exploring the third dimension , i .e . 3D integration . It provides a volumetric packaging solution for higher integration and performance and results in size and weight reduction . Approaches to achieve 3D integration are die and wafer stacking . A key technology to realize the potential of stacking is implementation of vertical electrical interconnects between die and wafer stacks . This thesis discusses the approach to form vertical interconnects between wafer stacks through solder reflow . It elaborates the fabrication process for formation of electrical interconnects and wafer bonding using photosensitive Benzocyclobutene (BCB ) . Profiler results of solder reflow are also included . Die level bonding for die stacking is also discussed . Bonding is achieved using a fluxless soldering and electrical interconnections between dies are formed through thermo -compression bonding . Two different solder compositions were used and bonding results are discussed . Furthermore , low frequency and high frequency analysis of interconnects are done to select the correct dimension for interconnects specific to the application . en_US
dc.language.iso EN en_US
dc.publisher Electrical Engineering en_US
dc.title 3D Interconnects For Die And Wafer Stacks en_US
dc.type M .E .E . en_US


3D Interconnects For Die And Wafer Stacks. Available electronically from http : / /hdl .handle .net /10106 /241 .

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